L. Villanueva, S. Schmid:
"Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro-and nanomechanical resonators";
Physical Review Letters, 113 (2014), 227201.
http://dx.doi.org/10.1103/PhysRevLett.113.227201Electronic version of the publication:
http://journals.aps.org/prl/abstract/10.1103/PhysRevLett.113.227201