T. Larsen, S. Keller, S. Schmid, S. Dohn, A. Boisen:
"Fabrication and Characterization of SRN/SU-8 Bimorph Cantilevers for Temperature Sensing";
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http://dx.doi.org/10.1016/j.mee.2010.12.015Electronic version of the publication:
http://www.sciencedirect.com/science/article/pii/S0167931710004934