%PDF-1.3
%
17 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xs
w3TPI2T0 BCcC#=s#c\.
͐,.. r
endstream
endobj
8 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xs
w3TPI2T0 BCcC#=s#C#\.
͐,.. %
endstream
endobj
7 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xs
w3TPI2T0 BCcC#=s#c\.
͐,.. r
endstream
endobj
6 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xs
w3TPI2T0 BCcC#=s#C#\.
͐,.. %
endstream
endobj
9 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xs
w3TPI2T0 BCcC#=s#c\.
͐,.. r
endstream
endobj
11 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xs
w3TPI2T0 BCcC#=s#c\.
͐,.. r
endstream
endobj
4 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xs
w3TPI2T0 BCcC#=s#C#\.
͐,.. %
endstream
endobj
15 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xs
w3TPI2T0 BCcC#=s#c\.
͐,.. r
endstream
endobj
12 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xs
w3TPI2T0 BCcC#=s#C#\.
͐,.. %
endstream
endobj
14 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xs
w3TPI2T0 BCcC#=s#C#\.
͐,.. %
endstream
endobj
16 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xs
w3TPI2T0 BCcC#=s#C#\.
͐,.. %
endstream
endobj
13 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xs
w3TPI2T0 BCcC#=s#c\.
͐,.. r
endstream
endobj
3 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 140>>stream
xA Db1MD/ ilfVܭ2p׀˵CËUnƬ[EW8yD \9 rB_ԌH+/R;'J1&o/ZU1
endstream
endobj
1 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 118>>stream
x̻
@~
,>JT#il6qBqSF)2JL3àT6+BI'l/p?_pqak+5[ɠ1R}SL=N"
endstream
endobj
5 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xs
w3TPI2T0 BCcC#=s#c\.
͐,.. r
endstream
endobj
10 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xs
w3TPI2T0 BCcC#=s#C#\.
͐,.. %
endstream
endobj
19 0 obj
<>stream
Issue10.1021/acsphotonics.1c01359
VoR
endstream
endobj
20 0 obj
<>stream
x+ |
endstream
endobj
21 0 obj
<>stream
xS**T0T0 Bid]"
Y
endstream
endobj
22 0 obj
<>stream
x+ |
endstream
endobj
23 0 obj
<>stream
xS**T0T0 Bih]"
[
endstream
endobj
24 0 obj
<>stream
x+ |
endstream
endobj
25 0 obj
<>stream
xS**T0T0 Bih]"
g
endstream
endobj
26 0 obj
<>stream
x+ |
endstream
endobj
27 0 obj
<>stream
xS**T0T0 BiUn)KT
endstream
endobj
28 0 obj
<>stream
x+ |
endstream
endobj
29 0 obj
<>stream
xS**T0T0 Bih]"
c
endstream
endobj
30 0 obj
<>stream
x+ |
endstream
endobj
31 0 obj
<>stream
xS**T0T0 Bih]"
W
endstream
endobj
32 0 obj
<>stream
x+ |
endstream
endobj
33 0 obj
<>stream
xS**T0T0 Bih]" S
_
endstream
endobj
34 0 obj
<>
endobj
49 0 obj
<>stream
x+ |
endstream
endobj
50 0 obj
<>stream
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