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@article{TUW-101113,
    author = {Kirchauer, Heinrich and Selberherr, Siegfried},
    title = {{R}igorous {T}hree-{D}imensional {P}hotoresist {E}xposure and {D}evelopment {S}imulation over {N}onplanar {T}opography},
    journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems},
    year = {1997},
    volume = {16},
    number = {12},
    pages = {1431--1438},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/JB1997_Kirchauer_1.pdf},
    doi = {10.1109/43.664225}
}