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@article{TUW-101125,
    author = {Pichler, Christoph and Plasun, Richard and Strasser, Rudolf and Selberherr, Siegfried},
    title = {{S}imulation of {C}omplete {V}{L}{S}{I} {F}abrication {P}rocesses with {H}eterogeneous {S}imulation {T}ools},
    journal = {{I}{E}{E}{E} {T}ransactions on {S}emiconductor {M}anufacturing},
    year = {1999},
    volume = {12},
    number = {1},
    pages = {76--86},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1999/JB1999_Pichler_1.pdf},
    doi = {10.1109/66.744527}
}