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@phdthesis{TUW-101135,
    author = {Strasser, Rudolf},
    title = {{R}igorous {T}{C}{A}{D} {I}nvestigations on {S}emiconductor {F}abrication {T}echnology},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1999},
    url = {http://www.iue.tuwien.ac.at/phd/rudolf_strasser}
}