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@article{TUW-101164,
    author = {Kirchauer, Heinrich and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {P}hotolithography {S}imulation},
    journal = {{I}{E}{E}{E} {J}ournal of {T}echnology {C}omputer {A}ided {D}esign},
    year = {1997},
    volume = {1},
    number = {6},
    url = {http://www.iue.tuwien.ac.at/htmlpapers/kirchauer-jun97/},
    doi = {10.1109/TCAD.1996.6449163}
}



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