@article{TUW-101171,
author = {Bohmayr, Walter and Burenkov, A. and Lorenz, J. and Ryssel, Heiner and Selberherr, Siegfried},
title = {{M}onte {C}arlo {S}imulation of {S}ilicon {A}morphization during {I}on {I}mplantation},
journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems},
year = {1998},
volume = {17},
number = {12},
pages = {1236--1243},
url = {http://www.iue.tuwien.ac.at/pdf/ib_1999/JB1998_Bohmayr_1.pdf},
doi = {10.1109/43.736563}
}
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