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@phdthesis{TUW-101182,
    author = {Kirchauer, Heinrich},
    title = {{P}hotolithography {S}imulation},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1998},
    url = {http://www.iue.tuwien.ac.at/phd/kirchauer}
}