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@phdthesis{TUW-101186,
    author = {Puchner, Helmut},
    title = {{A}dvanced {P}rocess {M}odeling for {V}{L}{S}{I} {T}echnology},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1996},
    url = {http://www.iue.tuwien.ac.at/phd/puchner}
}



Created from the Publication Database of the Vienna University of Technology.