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@inproceedings{TUW-101213,
    author = {Kirchauer, Heinrich and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {L}ight-{S}cattering over {N}onplanar {S}ubstrates in {P}hotolithography},
    booktitle = {{A}bstracts {E}lectron, {I}on and {P}hoton {B}eam {T}echnology and {N}anofabrication {C}onference},
    year = {1996},
    pages = {155--156},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/CP1996_Kirchauer_1.pdf},
    note = {poster presentation: {E}lectron, {I}on and {P}hoton {B}eam {T}echnology and {N}anofabrication {C}onference, {A}tlanta; 1996-05-28 -- 1996-05-31}
}