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@inproceedings{TUW-101258,
    author = {Pyka, Wolfgang and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {B}ulge {F}ormation in {C}ontact {H}ole {M}etalization},
    booktitle = {{P}roceedings {I}ntl. {C}onf. on {M}odeling and {S}imulation of {M}icrosystems},
    year = {1998},
    pages = {T4.3.3.},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1998_Pyka_1.pdf},
    isbn = {0-9666135-0-3},
    note = {poster presentation: {I}nternational {C}onference on {M}odeling and {S}imulation of {M}icrosystems ({M}{S}{M}), {S}anta {C}lara; 1998-05-06 -- 1998-05-08}
}