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@article{TUW-101261,
    author = {Kirchauer, Heinrich and Selberherr, Siegfried},
    title = {{A} {T}hree-{D}imensional {P}hotolithography {S}imulator {I}ncluding {R}igorous {N}onplanar {E}xposure {S}imulation for {O}ff-{A}xis {I}llumination},
    journal = {{P}roceedings of the {I}nternational {S}ymposium on {O}ptical {M}icrolithography ({S}{P}{I}{E})},
    year = {1998},
    volume = {3334},
    number = {ISBN: 0-8194-2779-9},
    pages = {764--776},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1998_Kirchauer_1.pdf}
}



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