@inproceedings{TUW-101276,
author = {Kosina, Hans and Selberherr, Siegfried},
title = {{T}echnology {C}{A}{D}: {P}rocess and {D}evice {S}imulation},
booktitle = {{P}roceedings of the {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L})},
year = {1997},
pages = {441--450},
url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1997_Kosina_2.pdf},
isbn = {0-7803-3664-x},
doi = {10.1109/ICMEL.1997.632866},
note = {invited; talk: {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L}), {N}is; 1997-09-14 -- 1997-09-17}
}
Created from the Publication Database of the Vienna University of Technology.