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@inproceedings{TUW-101297,
    author = {Fleischmann, Peter and Leitner, Ernst and Selberherr, Siegfried},
    title = {{O}ptimized {G}eometry {P}reprocessing for {T}hree-{D}imensional {S}emiconductor {P}rocess {S}imulation},
    booktitle = {{P}roceedings {I}{A}{S}{T}{E}{D} {I}ntl. {C}onf. on {A}pplied {M}odelling and {S}imulation},
    year = {1998},
    pages = {317--321},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1998_Fleischmann_1.pdf},
    isbn = {0-88986-270-2},
    note = {talk: {I}nternational {C}onference on {A}pplied {M}odelling and {S}imulation, {H}onolulu; 1998-08-12 -- 1998-08-14}
}



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