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@inproceedings{TUW-101338,
    author = {Pyka, Wolfgang and Fleischmann, Peter and Haindl, Bernhard and Selberherr, Siegfried},
    title = {{L}inking {T}hree-{D}imensional {T}opography {S}imulation with {H}igh {P}ressure {C}{V}{D} {R}eaction {K}inetics},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {1999},
    pages = {199--202},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2000/CP1999_Pyka_1.pdf},
    isbn = {4-930813-98-0},
    doi = {10.1109/SISPAD.1999.799295},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}yoto, {J}apan; 1999-09-06 -- 1999-09-08}
}



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