@inproceedings{TUW-101338,
author = {Pyka, Wolfgang and Fleischmann, Peter and Haindl, Bernhard and Selberherr, Siegfried},
title = {{L}inking {T}hree-{D}imensional {T}opography {S}imulation with {H}igh {P}ressure {C}{V}{D} {R}eaction {K}inetics},
booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
year = {1999},
pages = {199--202},
url = {http://www.iue.tuwien.ac.at/pdf/ib_2000/CP1999_Pyka_1.pdf},
isbn = {4-930813-98-0},
doi = {10.1109/SISPAD.1999.799295},
note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}yoto, {J}apan; 1999-09-06 -- 1999-09-08}
}
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