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@inproceedings{TUW-104996,
    author = {Selberherr, Siegfried and Langer, Erasmus},
    title = {{T}hree {D}imensional {P}rocess and {D}evice {M}odeling},
    booktitle = {{P}roceedings {M}{I}{E}{L} 89 {C}onf.},
    year = {1989},
    pages = {383--407},
    address = {1},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1989/CP1989_Selberherr_3.pdf},
    isbn = {0-948577-33-9},
    note = {invited; talk: {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L}), {N}is; 1989-05-09 -- 1989-05-11}
}



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