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@article{TUW-105008,
    author = {Hobler, Gerhard and Selberherr, Siegfried},
    title = {{M}onte {C}arlo {S}imulation of {I}on {I}mplantation into {T}wo- and {T}hree-{D}imensional {S}tructures},
    journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems},
    year = {1989},
    volume = {8},
    number = {5},
    pages = {450--459},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1989/JB1989_Hobler_1.pdf},
    doi = {10.1109/43.24873}
}