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@phdthesis{TUW-105015,
    author = {Seidl, Albert},
    title = {{Z}weidimensionale {S}imulation der lokalen {O}xidation von {S}ilizium},
    school = {{F}riedrich-{A}lexander-{U}niversit{\"a}t {E}rlangen-{N}{\"u}rnberg und {I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1988}
}



Created from the Publication Database of the Vienna University of Technology.