@phdthesis{TUW-105015, author = {Seidl, Albert}, title = {{Z}weidimensionale {S}imulation der lokalen {O}xidation von {S}ilizium}, school = {{F}riedrich-{A}lexander-{U}niversit{\"a}t {E}rlangen-{N}{\"u}rnberg und {I}nstitut f{\"u}r {M}ikroelektronik}, year = {1988} }