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@inproceedings{TUW-105056,
    author = {Wimmer, Karl and Bauer, Robert and Halama, Stefan and Hobler, Gerhard and Selberherr, Siegfried},
    title = {{S}imulation nichtplanarer {H}erstellungsprozesse mit {P}{R}{O}{M}{I}{S}},
    booktitle = {{T}agungsbericht {S}eminar {G}rundlagen und {T}echnologie elektronischer {B}auelemente},
    year = {1991},
    pages = {10--19},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1991/CP1991_Wimmer_1.pdf},
    note = {talk: {S}eminar {G}rundlagen und {T}echnologie elektronischer {B}auelemente, {G}ro{\ss}arl; 1991-03-20 -- 1991-03-23}
}



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