[Back]

@misc{TUW-105060,
    author = {Puchner, Helmut},
    title = {{P}rocess {I}ntegration for {D}eep-{S}ubmicron {C}{M}{O}{S} {T}echnology},
    year = {2001},
    howpublished = {habilitation thesis}
}



Created from the Publication Database of the Vienna University of Technology.