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@inproceedings{TUW-105990,
    author = {Wimmer, Karl and Bauer, Robert and Halama, Stefan and Hobler, Gerhard and Selberherr, Siegfried},
    title = {{T}ransformation {M}ethods for {N}onplanar {P}rocess {S}imulation},
    booktitle = {{P}roceedings {S}{I}{S}{D}{E}{P} 91},
    year = {1991},
    pages = {131--138},
    url = {http://publik.tuwien.ac.at/files/pub-et_6619.pdf},
    isbn = {3-89191-476-8},
    note = {talk: {I}nternational {C}onference on the {S}imulation of {S}emiconductor {D}evices and {P}rocesses ({S}{I}{S}{D}{E}{P}), {Z}{\"u}rich; 1991-09-12 -- 1991-09-14}
}



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