@phdthesis{TUW-106007, author = {Wimmer, Karl}, title = {{T}wo-{D}imensional {N}onplanar {P}rocess {S}imulation}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {1993}, url = {http://www.iue.tuwien.ac.at/phd/wimmer} }