@phdthesis{TUW-106078, author = {Stippel, Hannes}, title = {{S}imulation der {I}onen-{I}mplantation}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {1993}, url = {http://www.iue.tuwien.ac.at/phd/stippel} }