@phdthesis{TUW-106132, author = {Heitzinger, Clemens}, title = {{S}imulation and {I}nverse {M}odeling of {S}emiconductor {M}anufacturing {P}rocesses}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {2002}, url = {http://www.iue.tuwien.ac.at/phd/heitzinger} }