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@phdthesis{TUW-106132,
    author = {Heitzinger, Clemens},
    title = {{S}imulation and {I}nverse {M}odeling of {S}emiconductor {M}anufacturing {P}rocesses},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2002},
    url = {http://www.iue.tuwien.ac.at/phd/heitzinger}
}