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@inproceedings{TUW-106142,
    author = {Puchner, Helmut and Selberherr, Siegfried},
    title = {{A} {T}wo-{D}imensional {D}opant {D}iffusion {M}odel for {P}olysilicon},
    booktitle = {{A}bstracts {M}eeting on {I}mpurity {D}iffusion and {D}efects in {S}ilicon and {R}elated {M}aterials},
    year = {1995},
    pages = {16--17},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1995/CP1995_Puchner_2.pdf},
    note = {talk: {M}eeting on {I}mpurity {D}iffusion and {D}efects in {S}ilicon and {R}elated {M}aterials, {A}then; 1995-05-03 -- 1995-05-04}
}