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@article{TUW-106152,
    author = {Bohmayr, Walter and Burenkov, A. and Lorenz, J. and Ryssel, Heiner and Selberherr, Siegfried},
    title = {{T}rajectory {S}plit {M}ethod for {M}onte {C}arlo {S}imulation of {I}on {I}mplantation},
    journal = {{I}{E}{E}{E} {T}ransactions on {S}emiconductor {M}anufacturing},
    year = {1995},
    volume = {8},
    number = {4},
    pages = {402--407},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1995/JB1995_Bohmayr_1.pdf},
    doi = {10.1109/66.475181}
}