@inproceedings{TUW-106282,
author = {Heitzinger, Clemens and Sheikholeslami, Alireza and Puchner, Helmut and Selberherr, Siegfried},
title = {{P}redictive {S}imulation of {V}oid {F}ormation {D}uring the {D}eposition of {S}ilicon {N}itride and {S}ilicon {D}ioxide {F}ilms},
booktitle = {203\textsuperscript{rd} {E}{C}{S} {M}eeting},
year = {2003},
pages = {356--365},
url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2003_Heitzinger_1.pdf},
isbn = {1-56677-347-4},
note = {talk: {M}eeting of the {E}lectrochemical {S}ociety ({E}{C}{S}), {P}aris; 2003-04-26 -- 2003-05-02}
}
Created from the Publication Database of the Vienna University of Technology.