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@article{TUW-106366,
    author = {Heitzinger, Clemens and Pyka, Wolfgang and Tamaoki, N. and Takase, T. and Ohmine, T. and Selberherr, Siegfried},
    title = {{S}imulation of {A}rsenic {I}n {S}itu {D}oping {W}ith {P}olysilicon {C}{V}{D} and {I}ts {A}pplication to {H}igh {A}spect {R}atio {T}renches},
    journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems},
    year = {2003},
    volume = {22},
    number = {3},
    pages = {285--292},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/JB2003_Heitzinger_1.pdf},
    doi = {10.1109/TCAD.2002.807879}
}