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@inproceedings{TUW-106427,
    author = {Wittmann, Robert and H{\"o}ssinger, Andreas and Selberherr, Siegfried},
    title = {{S}tatistical {A}nalysis for the {T}hree-{D}imensional {M}onte {C}arlo {S}imulation of {I}on {I}mplantation},
    booktitle = {{I}ndustrial {S}imulation {C}onference 2003},
    year = {2003},
    pages = {159--163},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2003_Wittmann_1.pdf},
    isbn = {90-77381-03-1},
    note = {talk: {I}ndustrial {S}imulation {C}onference ({I}{S}{C}), {V}alencia; 2003-06-09 -- 2003-06-11}
}



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