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@inproceedings{TUW-106451,
    author = {Hollauer, Christian and Ceric, Hajdin and Selberherr, Siegfried},
    title = {{S}imulation of {T}hermal {O}xidation: {A} {T}hree-{D}imensional {F}inite {E}lement {A}pproach},
    booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})},
    year = {2003},
    pages = {383--386},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/CP2003_Hollauer_2.pdf},
    isbn = {0-7803-7999-3},
    note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {E}storil; 2003-09-16 -- 2003-09-18}
}