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@article{TUW-106783,
    author = {Pichler, P. and J{\"u}ngling, Werner and Selberherr, Siegfried and Guerrero, E. and P{\"o}tzl, Hans},
    title = {{S}imulation of {C}ritical {I}{C}-{F}abrication {S}teps},
    journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems},
    year = {1985},
    volume = {4},
    number = {4},
    pages = {384--397},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1985/JB1985_Pichler_2.pdf},
    doi = {10.1109/TCAD.1985.1270136}
}