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@article{TUW-106786,
    author = {J{\"u}ngling, Werner and Pichler, P. and Selberherr, Siegfried and Guerrero, E. and P{\"o}tzl, Hans},
    title = {{S}imulation of {C}ritical {I}{C} {F}abrication {P}rocesses {U}sing {A}dvanced {P}hysical and {N}umerical {M}ethods},
    journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices},
    year = {1985},
    volume = {32},
    number = {2},
    pages = {156--167},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1985/JB1985_Juengling_2.pdf},
    doi = {10.1109/T-ED.1985.21925}
}