@article{TUW-106840,
author = {Heitzinger, Clemens and Selberherr, Siegfried},
title = {{O}n the {S}imulation of the {F}ormation and {D}issolution of {S}ilicon {S}elf-{I}nterstitial {C}lusters and the {C}orresponding {I}nverse {M}odeling {P}roblem},
journal = {{M}icroelectronics {J}ournal},
year = {2004},
volume = {35},
number = {2},
pages = {167--171},
url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/JB2004_Heitzinger_1.pdf},
doi = {10.1016/j.mejo.2003.09.014}
}
Created from the Publication Database of the Vienna University of Technology.