[Back]

@inproceedings{TUW-106846,
    author = {Heitzinger, Clemens and Sheikholeslami, Alireza and Badrieh, Fuad and Puchner, Helmut and Selberherr, Siegfried},
    title = {{F}eature {S}cale {S}imulation of {A}dvanced {E}tching {P}rocesses},
    booktitle = {204\textsuperscript{th} {E}{C}{S} {M}eeting},
    year = {2003},
    pages = {1259},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/CP2003_Heitzinger_4.pdf},
    isbn = {1-56677-398-9},
    note = {talk: {M}eeting of the {E}lectrochemical {S}ociety, {P}hysical {E}lectrochemistry, {O}rlando; 2003-10-12 -- 2003-10-16}
}