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@inproceedings{TUW-107471,
    author = {Sheikholeslami, Alireza and Heitzinger, Clemens and Grasser, Tibor and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {T}opography {S}imulation for {D}eposition and {E}tching {P}rocesses {U}sing a {L}evel {S}et {M}ethod},
    booktitle = {2004 {I}nternational {C}onference on {M}icroelectronics},
    year = {2004},
    pages = {241--244},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/CP2004_Sheikholeslami_1.pdf},
    isbn = {0-7803-8166-1},
    note = {talk: {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L}), {N}is; 2004-05-16 -- 2004-05-19}
}



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