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@inproceedings{TUW-107733,
    author = {Wessner, Wilfried and Hollauer, Christian and H{\"o}ssinger, Andreas and Selberherr, Siegfried},
    title = {{A}nisotropic {L}aplace {R}efinement for {T}hree-{D}imensional {O}xidation {S}imulation},
    booktitle = {{P}roceedings of the 9th {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2004},
    pages = {165--168},
    publisher = {{S}pringer},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2005/CP2004_Wessner_1.pdf},
    isbn = {3211224688},
    doi = {10.1007/978-3-7091-0624-2{\_}39},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {M}unich, {G}ermany; 2004-09-02 -- 2004-09-04}
}



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