[Back]

@inproceedings{TUW-107734,
    author = {Wittmann, Robert and H{\"o}ssinger, Andreas and Selberherr, Siegfried},
    title = {{M}onte {C}arlo {S}imulation of {I}on {I}mplantation in {S}ilicon-{G}ermanium {A}lloys},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2004},
    pages = {169--172},
    publisher = {{S}pringer},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2005/CP2004_Wittmann_1.pdf},
    isbn = {3211224688},
    doi = {10.1007/978-3-7091-0624-2{\_}40},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {M}unich, {G}ermany; 2004-09-02 -- 2004-09-04}
}



Created from the Publication Database of the Vienna University of Technology.