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@article{TUW-107742,
    author = {Stippel, Hannes and Leitner, Ernst and Pichler, Christoph and Puchner, Helmut and Strasser, Ernst and Selberherr, Siegfried},
    title = {{P}rocess {S}imulation for the 1990s},
    journal = {{M}icroelectronics {J}ournal},
    year = {1995},
    volume = {26},
    number = {2-3},
    pages = {203--215},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1995/JB1995_Stippel_1.pdf},
    doi = {10.1016/0026-2692(95)98922-E},
    note = {invited}
}