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@inproceedings{TUW-107926,
    author = {Wittmann, Robert and H{\"o}ssinger, Andreas and Selberherr, Siegfried},
    title = {{C}alibration for the {M}onte {C}arlo {S}imulation of {I}on {I}mplantation in {R}elaxed {S}i{G}e},
    booktitle = {206\textsuperscript{th} {E}{C}{S} {M}eeting},
    year = {2004},
    pages = {181--192},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2005/CP2004_Wittmann_2.pdf},
    isbn = {1-56677-420-9},
    note = {talk: {M}eeting of the {E}lectrochemical {S}ociety, {S}i{G}e and {G}ermanium: {M}aterials, {P}rocessing, and {D}evices, {H}onolulu; 2004-10-03 -- 2004-10-08}
}



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