author = {Sheikholeslami, Alireza and Holzer, Stefan and Heitzinger, Clemens and Leicht, M. and H{\"a}berlen, O. and Fugger, J. and Grasser, Tibor and Selberherr, Siegfried},
    title = {{I}nverse {M}odeling of {O}xid {D}eposition {U}sing {M}easurements of a {T}{E}{O}{S} {C}{V}{D} {P}rocess},
    booktitle = {2005 {P}h{D} {R}esearch in {M}icroelectronics and {E}lectronics},
    year = {2005},
    pages = {279--282},
    address = {{V}ol. 2},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/CP2005_Sheiklholeslami_2.pdf},
    isbn = {0-7803-9345-7},
    note = {talk: {P}h{D} {R}esearch in {M}icroelectronics and {E}lectronics ({P}{R}{I}{M}{E}), {L}ausanne; 2005-07-25 -- 2005-07-28}

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