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@inproceedings{TUW-108986,
    author = {Wittmann, Robert and H{\"o}ssinger, Andreas and Selberherr, Siegfried},
    title = {{M}onte {C}arlo {S}imulation of {I}on {I}mplantation for {D}oping of {S}trained {S}ilicon {M}{O}{S}{F}{E}{T}s},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2005},
    pages = {191--194},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/CP2005_Wittmann_1.pdf},
    isbn = {4-9902762-0-5},
    doi = {10.1109/SISPAD.2005.201505},
    note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {T}okyo, {J}apan; 2005-09-01 -- 2005-09-03}
}



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