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@incollection{TUW-109723,
    author = {Hollauer, Christian and Ceric, Hajdin and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {T}hermal {O}xidation and the {I}nfluence of {S}tress},
    booktitle = {{Physics and Chemistry of SiO{$_{2}$} and the Si-SiO{$_{2}$} Interface-5, Vol. 1 No. 1}},
    year = {2005},
    pages = {103--113},
    organization = {{H}.{Z}. {M}assoud, {J}.{H}. {S}tathis, {T}. {H}attori, {D}. {M}isra, {I}. {B}aumvol},
    publisher = {{E}{C}{S} {T}ransactions},
    address = {{P}ennington},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/JB2005_Hollauer_1.pdf},
    isbn = {1-56677-430-6}
}



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