author = {Sheikholeslami, Alireza and Heinzl, Rene and Holzer, Stefan and Heitzinger, Clemens and Spevak, Michael and Leicht, M. and H{\"a}berlen, O. and Fugger, J. and Badrieh, Fuad and Parhami, Farnaz and Puchner, H and Grasser, Tibor and Selberherr, Siegfried},
    title = {{A}pplications of {T}wo- and {T}hree-{D}imensional {G}eneral {T}opography {S}imulator in {S}emiconductor {M}anufacturing {P}rocesses},
    booktitle = {{P}roceedings of the 14\textsuperscript{th} {I}ranian {C}onference on {E}lectrical {E}ngineering {I}{C}{E}{E} 2006},
    year = {2006},
    numpages = {4},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/CP2006_Sheikholeslami_1.pdf},
    note = {talk: {I}ranian {C}onference on {E}lectrical {E}ngineering ({I}{C}{E}{E}), {T}ehran; 2006-05-16 -- 2006-05-18}

Created from the Publication Database of the Vienna University of Technology.