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@inproceedings{TUW-110134,
    author = {Suvorov, V and H{\"o}ssinger, Andreas and Djuric, Zoran},
    title = {{A} {N}ovel {A}pproach to {T}hree-{D}imensional {S}emiconductor {P}rocess {S}imulation: {A}pplication to {T}hermal {O}xidation},
    booktitle = {{B}ook of {A}bstracts of the 11th {I}nternational {W}orkshop on {C}omputational {E}lectronics ({I}{W}{C}{E})},
    year = {2006},
    pages = {3--4},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/CP2006_Hoessinger_1.pdf},
    isbn = {3-901578-16-1},
    note = {talk: {I}nternational {W}orkshop on {C}omputational {E}lectronics ({I}{W}{C}{E}), {V}ienna, {A}ustria; 2006-05-25 -- 2006-05-27}
}



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