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@inproceedings{TUW-110377,
    author = {Wittmann, Robert and H{\"o}ssinger, Andreas and Cervenka, Johann and Uppal, S and Selberherr, Siegfried},
    title = {{M}onte {C}arlo {S}imulation of {B}oron {I}mplantation into (100) {G}ermanium},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2006},
    pages = {381--384},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2007/CP2006_Wittmann_1.pdf},
    isbn = {1-4244-0404-5},
    doi = {10.1109/SISPAD.2006.282914},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {M}onterey, {C}{A}, {U}{S}{A}; 2006-09-06 -- 2006-09-08}
}



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