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@phdthesis{TUW-110405,
    author = {Minixhofer, R.},
    title = {{I}ntegration {T}echnology {S}imulation into the {S}emiconductor {M}anufacturing {E}nvironment},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2006},
    url = {http://www.iue.tuwien.ac.at/phd/minixhofer}
}



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