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@inproceedings{TUW-110475,
    author = {Sheikholeslami, Alireza and Parhami, Farnaz and Puchner, H and Selberherr, Siegfried},
    title = {{P}lanarization of {S}ilicon {D}ioxide and {S}ilicon {N}itride {P}assivation {L}ayers},
    booktitle = {{I}nternational {C}onference on {N}anoscience and {T}echnology ({I}{C}{N}{T} 2006)},
    year = {2006},
    pages = {163--164},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2007/CP2006_Sheikholeslami_2.pdf},
    isbn = {3-905084-71-6},
    note = {talk: {I}nternational {C}onference on {N}anoscience and {T}echnology ({I}{C}{N}{T}), {B}asel; 2006-07-30 -- 2006-08-04}
}



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