author = {Wittmann, Robert and Uppal, S and H{\"o}ssinger, Andreas and Cervenka, Johann and Selberherr, Siegfried},
    title = {{A} {S}tudy of {B}oron {I}mplantation into {H}igh {G}e {C}ontent {S}i{G}e {A}lloys},
    booktitle = {{S}i{G}e and {G}e: {M}aterials, {P}rocessing, and {D}evices, {V}ol. 3, {N}o. 7},
    year = {2006},
    editor = {Harame, D. and Boquet, J. and Caymax, M. and Cressler, J. and Iwai, H. and Koester, S. and Masini, G. and Murota, J. and Reznicek, A. and Rim, K. and Tillack, B. and Zaima, S.},
    pages = {667--676},
    organization = {{T}he {E}lectrochemical {S}ociety},
    publisher = {{E}{C}{S} {T}ransactions},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2007/JB2006_Wittmann_1.pdf},
    isbn = {1-56677-507-8},
    doi = {10.1149/1.2355862}

Created from the Publication Database of the Vienna University of Technology.