@phdthesis{TUW-111272, author = {Hollauer, Christian}, title = {{M}odelling of {T}hermal {O}xidation and {S}tress {E}ffects}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {2007}, url = {http://www.iue.tuwien.ac.at/phd/hollauer/} }